University of Technology Sydney

68320 Nanofabrication and Nanocharacterization Techniques

6cp; 6hpw


Characterisation and fabrication of nano-materials and nano-devices requires analysis and manipulation tools with extreme precision. This is a central issue in nanotechnology and many contemporary areas of materials physics. Techniques, such as chemical vapour deposition, reactive ion etching, electron beam lithography and focused ion beam microscopy allows us to synthesize materials and devices at this level. Imaging and analysis with nano-scale resolution is performed by microscopy techniques such as electron microscopy, scanning tunnelling microscopy and high-resolution fluorescence microscopy techniques. This subject introduces the concepts behind current nano-scale fabrication and analysis techniques as well as their use and application in many areas of science and technology. Recent developments in the techniques are introduced, and students have the opportunity to gain experience using a variety of imaging, analysis and nanofabrication techniques.

Typical availability

Spring session, City campus

Detailed subject description.

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